Apparatus for viewing and analyzing ultraviolet beams

Details Apparatus for viewing and analyzing ultraviolet beams Apparatus for viewing and analyzing ultraviolet beams

2006-02-28

2006-02-28

Nguyen, Thong Q (Department: 2872)

Optical: systems and elements

Having significant infrared or ultraviolet property

Lens, lens system or component

C359S326000, C359S350000, C359S642000, C250S372000

Reexamination Certificate

active

07006284

ABSTRACT:
An imaging apparatus for DUV beams is provided which includes a lens for receiving a DUV beam and producing an image of the DUV beam, wherein the lens has an aplanatic surface and a hemispheric surface, and wherein at least the aplanatic surface is made from or otherwise has a down-converting medium for producing a down-converted beam; an image sensing member for viewing an image of the down-converted beam; and optics for relaying the image of the down-converted beam from the lens to the image sensing member. A processor can be communicated with the image sensing member for analyzing the image of the DUV beam.

REFERENCES:
patent: 4835088 (1989-05-01), Gilson
patent: 5631767 (1997-05-01), Dodge et al.
patent: 5864207 (1999-01-01), Kume et al.
patent: 5939709 (1999-08-01), Ghislain et al.
patent: 6730915 (2004-05-01), Fricke et al.

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