Apparatus for variable optical focusing for processing chambers

Details Apparatus for variable optical focusing for processing chambers Apparatus for variable optical focusing for processing chambers

1996-12-04

1998-01-27

Bueker, Richard

Coating apparatus

Gas or vapor deposition

With treating means

118715, 118726, C23C 1400

Patent

active

057118108

ABSTRACT:
In a pulsed laser deposition system, the two optical actions of focusing rastering, and the optical chamber window are combined into a single optics system. The single optics system is mounted on the processing chamber. Combining the three separate optical functions into one optics system facilitates laser beam control and reduces the space needed for the apparatus.

REFERENCES:
patent: 5242706 (1993-09-01), Cotell et al.
patent: 5290761 (1994-03-01), Keating et al.
patent: 5386798 (1995-02-01), Lowndes et al.
patent: 5432151 (1995-07-01), Russo et al.
patent: 5490912 (1996-02-01), Warner et al.
patent: 5499599 (1996-03-01), Lowndes et al.
patent: 5535128 (1996-07-01), Laube et al.

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