Apparatus for vapor depositing on tape having grooved evaporator

Coating apparatus – Gas or vapor deposition – Running length work

Patent

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Details

118730, 118726, 373118, 392388, 392389, C23C 1400

Patent

active

051980320

ABSTRACT:
The invention relates to a tape vapor coating apparatus for the production of film webs 50 coated in a vacuum, with a coating chamber for the accommodation and advancement of a film web 50 as well as an evaporation source 19 provided in the housing and having at least one evaporating cell 21, at least one recess 15 being provided in the evaporating cell 21 to accommodate the substance that is to be evaporated. In the recess 15 of the evaporating cell 21 for the accommodation of the substance to be evaporated there is provided an additional, groove-like recess 14.

REFERENCES:
patent: 2962538 (1960-11-01), Alexander
patent: 3117887 (1964-01-01), Shepard et al.
patent: 5076203 (1991-12-01), Vaidya et al.

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