Coating apparatus – With vacuum or fluid pressure chamber
Patent
1977-03-21
1978-10-24
Reynolds, Wm. Carter
Coating apparatus
With vacuum or fluid pressure chamber
118 491, B05C 1100, C23C 1308
Patent
active
041215370
ABSTRACT:
An apparatus for vacuum deposition comprising a turn-table for holding substrates for deposition, and a plurality of evaporation boats arranged in opposition to a circumferential part of the turn-table, the turn-table being rotated at deposition whereby vapors from the respective boats can be cyclically accumulated and stuck onto the substrates, further comprises at least one film-thickness monitor which is fixed to the turn-table and which detects the quantity of a deposited substance of one layer stuck every time the substrates pass over each boat, and means to receive a signal from the film-thickness monitor and divide the signal time sequentially, thereby detecting at least one of the deposition rate and the total amount of the vapor from each boat, and to control the quantity of the vapor arriving to the substrates for deposition from each boat while comparing the detected value with a predetermined value.
REFERENCES:
patent: 3382842 (1968-05-01), Steckelmacher et al.
patent: 3732846 (1973-05-01), Lukaszek et al.
patent: 3800738 (1974-04-01), Tassara
patent: 3939798 (1976-02-01), Morton
patent: 4024291 (1977-05-01), Wilmanns
patent: 4059067 (1977-11-01), Lardon et al.
Hirai Tadaaki
Inao Kiyohisa
Ishioka Sachio
Maruyama Eiichi
Yamamoto Hideaki
Hitachi , Ltd.
Reynolds Wm. Carter
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