Apparatus for uniform gas and radiant heat dispersion for solid

Details Apparatus for uniform gas and radiant heat dispersion for solid Apparatus for uniform gas and radiant heat dispersion for solid

1999-02-16

2000-05-16

Jeffery, John A.

Electric resistance heating devices

Heating devices

Radiant heater

118724, 118 501, H01L 21205

Patent

active

060648007

ABSTRACT:
A gas distribution showerhead uniformly distributes gas and undistorted radiant heat in an RTP chamber. A gas passageway exists within the showerhead and is suitable for connection to a source of gas. The gas passageway terminates in a plurality of gas ports on a surface of the showerhead. A plurality of energy passageways exist in the showerhead. The energy passageways are exclusive of both the gas passageway and the gas ports, and terminate on the surface of the showerhead. The energy passageways are preferably openings in the showerhead lined with reflectors, although any material which aids in the transmission of the energy may be used. Preferably a plurality of light sources are provided as the energy sources, and they are positioned to transmit light through the energy passageways and out of the surface of the showerhead.

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