Apparatus for treating the surface with neutral particle beams

Details Apparatus for treating the surface with neutral particle beams Apparatus for treating the surface with neutral particle beams

2005-08-30

2005-08-30

Hassanzadeh, Parviz (Department: 1763)

Coating apparatus

Gas or vapor deposition

With treating means

C118S7230AN, C118S724000, C156S345370, C156S348000

Reexamination Certificate

active

06935269

ABSTRACT:
The present invention relates to an apparatus for treating the surface with neutral particle beams comprising an antenna container, a plasma generating part, a neutral particle beam generating part and a treating part, wherein the antenna container comprises antennas connected to high frequency electric power supply through which high frequency electric power supplies, the plasma generating part transfers gases from a gas injector into plasmas with the supplied power, the neutral particle beam generating part reverts the obtained plasmas to neutral particle beams via the collision thereof with metal plates, and the treating part treats the surface of a target with the neutral particle beams.

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patent: 62-185324 (1987-08-01), None

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