Apparatus for treating the inner surface of vacuum chamber

Details Apparatus for treating the inner surface of vacuum chamber Apparatus for treating the inner surface of vacuum chamber

1997-01-17

1998-10-13

Pitts, A. L.

Gear cutting, milling, or planing

Broaching

With means to clean, lubricate, or modify temperature of...

407 19, 409268, 409276, B23D 3900

Patent

active

058203206

ABSTRACT:
An apparatus for treating the inner surface of a vacuum chamber includes a support, means for anchoring the vacuum chamber to the support and holding the vacuum chamber, a broach having a plurality of cutting edges having cutouts, and broach drive means to which the broach arranged on the support is fitted. The broach drive means unidirectionally moves the broach relatively to the vacuum chamber in an axial direction to cut off a contaminated layer on an inner surface of the vacuum chamber. The outer diameter of each cutting edge, excluding the cutouts, is set greater than that of an immediately preceding one in a direction of a rearmost edge face from a front edge face. The apparatus may also include means for supplying an inert gas or a mixture of nitrogen and inert gases to a surface of the vacuum chamber being treated by the broach, or means for supplying a lower alcohol for dissolving contaminants contained in the contaminated layer to the surface of the vacuum chamber being treated by the broach.

REFERENCES:
patent: 1426738 (1922-08-01), Hook
patent: 1588716 (1926-06-01), Ferris
patent: 1627755 (1927-05-01), Urschel
patent: 1935774 (1933-11-01), Halborg
patent: 2373995 (1945-04-01), Bonnafe
patent: 2726704 (1955-12-01), Fischer
patent: 3971114 (1976-07-01), Dudley
patent: 4266894 (1981-05-01), Zuzanov et al.
patent: 4477216 (1984-10-01), Van De Motter et al.
patent: 4573841 (1986-03-01), Petkov et al.
patent: 5503506 (1996-04-01), Yuan

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