Apparatus for treating surface of object with ultraviolet rays a

Details Apparatus for treating surface of object with ultraviolet rays a Apparatus for treating surface of object with ultraviolet rays a

1988-01-27

1989-06-27

Terapane, John F.

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

With means applying electromagnetic wave energy or...

42218605, B01J 1912

Patent

active

048428280

ABSTRACT:
A surface treatment apparatus for treating the surface of a substrate that is supported on a rotating table. The apparatus has a plate transmissive of ultraviolet rays that is mounted in parallel with the substrate. The plate has a plurality of supply nozzles for supplying a reactive gas to the rotating substrate surface, the nozzles being provided at positions of different radius of rotation in order to complete the surface treatment in a short period of time.

REFERENCES:
patent: 4209357 (1980-06-01), Gorin et al.
patent: 4297162 (1981-10-01), Mundt et al.
patent: 4307283 (1981-12-01), Zajac
patent: 4516527 (1985-05-01), Sugioka

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