Chemical apparatus and process disinfecting – deodorizing – preser – Chemical reactor – Waste gas purifier
Reexamination Certificate
1999-07-23
2001-11-13
Knode, Marian C. (Department: 1764)
Chemical apparatus and process disinfecting, deodorizing, preser
Chemical reactor
Waste gas purifier
C422S169000, C422S171000, C422S182000, C422S228000, C055S413000, C055S427000, C055S436000, C055S439000, C055S446000, C055S465000
Reexamination Certificate
active
06315960
ABSTRACT:
BACKGROUND OF THE INVENTION
The present invention is concerned with the removal of matter from gases including the separation of particulate therefrom.
In the manufacture of computer chips hazardous gases are generated which must be reduced to an inert state prior to being vented to the atmosphere. Silane gas, for example, occurs in the manufacture of semiconductors, photovoltaic and flat panels and cannot be vented to the atmosphere in view of its toxicity. The gas is pyrophoric and when oxidized results in the precipitation of particulate. Subsequent to such treatment the gas may be subjected to further processing, as by a scrubber, prior to release to the atmosphere. A co-pending patent application, Ser. No. 09/050,173, is currently pending and is directed toward the treatment of such hazardous gases, and is incorporated herein by reference.
SUMMARY OF THE PRESENT INVENTION
The present invention is embodied in an apparatus which mixes oxygen with a hazardous gas with provision made for convenient removal of particulate collected from the oxidized gas flow.
In the apparatus a mixing chamber receives air and a flow of a pyrophoric gas and discharges the combined flows into a separator having a series of radially spaced conduits arranged to direct the combined flow along reversed paths to separate particulate formed from the mixed and burned gases. The separator includes concentric tubular members constraining the mixed flow for travel in those areas defined by adjacent tubular members. A lowermost portion of the separator is located in an enclosure and constitutes a receptacle. Mounting means permits removal of the receptacle from the separator for cleaning purposes without interruption of related manufacturing operations. During cleaning the separator housing is ventilated to prevent the escape of hazardous gas and particulate from the housing interior. Automatic venting of the housing prevents escape of hazardous gas and particulate into the atmosphere during receptacle removal and reinstallation. A modified form of the separator includes added filtering and adsorbent features.
Important objectives of the present apparatus include the provision of a separator with concentric tubular members producing a reverse flow of a gas and air mixture with particulate from the mixture gravitating into a detachable receptacle enabling periodic removal of collected matter, the provision of a reverse flow separator including a detachable collector or receptacle located in an enclosure which at all times has a negative atmospheric pressure to preclude the release of hazardous gas to the atmosphere; the provision of a separator having a portion located within an enclosure with opening of the enclosure automatically providing a bypass in communication with a negative pressure source, such as a scrubber of an industrial plant, to prevent escape of hazardous gas to the atmosphere; the provision of a separator which subjects a pyrophoric gas to oxidation, filtration and chemical treatments. These and other objects will become clear upon an understanding of the following described structure.
REFERENCES:
patent: 6030585 (2000-02-01), Shiban
Givnan, Jr. James D.
Knode Marian C.
Varcoe Frederick
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