Apparatus for treating perfluorocompound gas

Chemical apparatus and process disinfecting – deodorizing – preser – Chemical reactor – Waste gas purifier

Reexamination Certificate

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Details

C422S172000, C422S173000, C055S337000, C055S459100

Reexamination Certificate

active

10137449

ABSTRACT:
In order to prevent exhaust pipe for exhausting perfluorocompound (PFC) decomposition gas after washing from corrosion, a mist separating apparatus is provided at a rear stage of the washing tower for washing the PFC decomposition gas. The corrosion of the exhaust pipe can be prevented by removing the mist from the washed gas.

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