Cleaning and liquid contact with solids – Apparatus – With heating – cooling or heat exchange means
Reexamination Certificate
2005-01-04
2005-01-04
Stinson, Frankie L. (Department: 1746)
Cleaning and liquid contact with solids
Apparatus
With heating, cooling or heat exchange means
C134S102100, C134S102300, C134S902000, C134S148000, C134S153000
Reexamination Certificate
active
06837252
ABSTRACT:
In a method for processing a workpiece to remove material from a first surface of the workpiece, steam is introduced onto the first surface under conditions so that at least some of the steam condenses and forms a liquid boundary layer on the first surface. The condensing steam helps to maintain the first surface of the workpiece at an elevated temperature. Ozone is provided around the workpiece under conditions where the ozone diffuses through the boundary layer and reacts with the material on the first surface. The temperature of the first surface is controlled to maintain condensation of the steam.
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Perkins Coie LLP
Semitool Inc.
Stinson Frankie L.
LandOfFree
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