Apparatus for transmitting heat under vacuum by grains

Details Apparatus for transmitting heat under vacuum by grains Apparatus for transmitting heat under vacuum by grains

1989-05-03

1991-02-05

Envall, Jr., Roy N.

Electric heating

Heating devices

With heater-unit housing, casing, or support means

219385, 219399, 219430, 219540, H05B 306

Patent

active

049907549

ABSTRACT:
A heat transmission apparatus is formed between a thermal source (12) and an object (21) in a vacuum enclosure (1) by placing in a cavity defined by a heat emission wall (20) and the object (21), a granular material (30) which adapts to the thermal expansions, while permitting heating by conductivity under very good conditions.
Possible application to the manufacture of semiconductors and the crystallization of thin films.

REFERENCES:
patent: 3495524 (1970-02-01), Miles
patent: 4481406 (1984-11-01), Muka
patent: 4599069 (1986-07-01), Murakami
patent: 4778559 (1988-10-01), McNeilly

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