Apparatus for transformation of a collimated beam into a source

Details Apparatus for transformation of a collimated beam into a source Apparatus for transformation of a collimated beam into a source

1982-06-23

1985-05-14

Sikes, William L.

350 372, 350 9618, 350167, G02B 514

Patent

active

045168326

ABSTRACT:
A laser light source for a high resolution projection lithography system and transforming optical apparatus which transforms the laser light into an optically equivalent self-luminous curved line source. The transforming optical apparatus comprises a two-dimensional array of fly's eye lenses positioned to intercept light from the light source and to produce a series of point sources having a selected numerical aperture. An optical fiber array is positioned so that the imput end of each fiber receives the light output from one of the lenses in the array. The position of the fibers is chosen so that light from the lenses underfills the fibers to preserve the numerical aperture. The output ends of the fibers are arranged in position to produce a curved line source of a desired shape. Alternate embodiments are described in which lens arrays can be selectively positioned to change the numerical aperture of the transforming optical apparatus.

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patent: 3827075 (1974-07-01), Baycura
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patent: 4156555 (1979-05-01), McMahon
patent: 4345833 (1982-08-01), Siegmund
patent: 4409477 (1983-10-01), Carl

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