Apparatus for transferring thin sheet-like article such as wafer

Details Apparatus for transferring thin sheet-like article such as wafer Apparatus for transferring thin sheet-like article such as wafer

1984-03-02

1986-07-22

Underwood, Donald W.

Material or article handling

Apparatus for charging a load holding or supporting element...

Load holding or supporting element including gripping means

1984682, 2941191, 294907, 414741, 414744A, B65H 510

Patent

active

046016279

ABSTRACT:
An apparatus for transferring thin sheet-like articles such as wafers is disclosed. The apparatus is provided with opposed pairs of contact elements capable of adjusting the distance between said pairs of contact elements. The thin sheet-like articles are transferred one by from a transfer passage to a treating station while they are clamped between said pairs of contact elements by a transfer mechanism movable between the transfer passage and the treating station.

REFERENCES:
patent: 2636770 (1953-04-01), Cornwell
patent: 2882085 (1959-04-01), Abbott
patent: 3618800 (1971-11-01), Collins
patent: 3682327 (1972-08-01), Winne
patent: 4256429 (1981-03-01), Dwyer
patent: 4286380 (1981-09-01), Blount
patent: 4479673 (1984-10-01), Inaba et al.

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