Apparatus for transferring substrates

Details Apparatus for transferring substrates Apparatus for transferring substrates

2011-06-07

2011-06-07

Morano, S. Joseph (Department: 3617)

Railways

Magnetically suspended car

C104S283000, C104S284000, C104S290000, C414S749200

Reexamination Certificate

active

07954434

ABSTRACT:
An apparatus for transferring substrates includes a carrier to which substrates are loaded, an upper transfer unit transferring the carrier horizontally by applying thrust to the carrier, a lower transfer unit maintaining the lower body of the carrier at the horizontal in a non-contact status, a magnetic levitation module levitating the carrier magnetically, and a lower damper unit maintaining the lower center of gravity of the carrier levitated by the magnetic levitation module.

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