Apparatus for transferring semiconductor wafers

Details Apparatus for transferring semiconductor wafers Apparatus for transferring semiconductor wafers

1976-10-08

1978-01-17

Camby, John J.

Heating

Work chamber having heating means

Having means by which work is progressed or moved mechanically

198774, 432258, F27B 914

Patent

active

040690091

ABSTRACT:
An apparatus for automatically transferring semiconductor wafers is disclosed. Semiconductor wafers are loaded on a boat which is placed on a pair of first supporting bars. A pair of second supporting bars are driven by a motor to repeat circular motion between the first supporting bars. The second supporting bars, circularly moving in parallel with the first supporting bars, forwardly transfer the boat. The boat is kept uplifted over the first supporting bars during the forward transfer thereof. Repetition of the circular motion of the second supporting bars makes the automatic transfer of the semiconductor wafers to be heat-treated in a semiconductor manufacturing system.

REFERENCES:
patent: 3455433 (1969-07-01), Gentry
patent: 3776351 (1973-12-01), Erb
patent: 3811825 (1974-05-01), Enderlein
patent: 3820946 (1974-06-01), Miyoshi et al.
patent: 3948494 (1976-04-01), Werych
patent: 3998333 (1976-12-01), Kamada

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