Apparatus for transferring semiconductor wafers

Details Apparatus for transferring semiconductor wafers Apparatus for transferring semiconductor wafers

1989-07-11

1991-10-08

Spar, Robert J.

Material or article handling

Device for emptying portable receptacle

For emptying contents thereof into portable receiving means

981153, 414417, 4147448, B65G 6504, H01L 2160

Patent

active

050549880

ABSTRACT:
The present invention relates to an apparatus for transferring a plurality of semiconductor wafers from their cassettes to a boat. This apparatus comprises a support body on which the cassettes and the boat are mounted, a lifter for lifting wafers from the cassettes, a handling device for carrying the wafers and transferring them to the boat, and a plurality fans for introducing dust created by the handling device into the support body and removing it outside the support body.

REFERENCES:
patent: 4568234 (1986-02-01), Lee et al.
patent: 4573851 (1986-03-01), Butler
patent: 4597819 (1986-07-01), Kusuhara et al.
patent: 4890780 (1990-02-01), Mimata et al.
patent: 4904153 (1990-02-01), Iwasawa et al.
patent: 4923352 (1990-05-01), Tamura et al.
patent: 4947784 (1990-08-01), Nishi

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