Electric heating – Metal heating – By arc
Patent
1991-09-30
1993-08-17
Paschall, Mark H.
Electric heating
Metal heating
By arc
21912143, 219 1055A, 21912144, 156345, 427446, 20429818, B23K 900
Patent
active
052371522
ABSTRACT:
Apparatus for thin-coating processes for the treatment of substrates (8) of large surface area using a plasma (6) which is excited by microwaves (M) and the latter are coupled from a source by means of a waveguide (1) consisting of at least one hollow conductor (1), as well as by means of a horn antenna, into a plasma chamber (5), the waveguide (W) having a substantially rectangular aperture, an area is provided at the end of the hollow conductor (Q) with a slit-like constriction (Q), a rectangular horn (2) adjoins this area, and a compensation area (3) is provided between the largest aperture of the rectangular horn (2), as well as of the plasma chamber (5).
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Gegenwart Rainer
Gesche Roland
Kretschmer Karl-Heinz
Noll Sonja
Ritter Jochen
Leybold Aktiengesellschaft
Paschall Mark H.
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