Apparatus for thermal treatment of semiconductors

Details Apparatus for thermal treatment of semiconductors Apparatus for thermal treatment of semiconductors

1980-03-24

1984-09-18

Roskoski, Bernard

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

422113, 432205, B01J 304, F01B 516, C23C 1100

Patent

active

044726228

ABSTRACT:
In an apparatus for thermal treatment of semiconductors in a treating gas, a treating tube has a heating portion, an extending portion, and a sealing portion, and convection-preventing plates are disposed within a treating tube, between one end of the heating portion and the sealing portion, so as to interrupt currents of the treating gas. A heating element is arranged so that the quantities of heat generated along the heating portion are largest near a gas-discharging end of the heating portion, intermediate near a gas-discharging end thereof, and smallest therebetween. The plates are mounted to the sealing portion so as to be inserted into the treating tube when the sealing portion is attached and so as to be withdrawn from the treating tube when the sealing portion is detached. The plates may be mounted integrally to the sealing portion.

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patent: 4235841 (1980-11-01), Zimmerman
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