Coating apparatus – With cutting – punching or tearing of work – Web or sheet work
Patent
1976-11-22
1979-04-03
Stein, Mervin
Coating apparatus
With cutting, punching or tearing of work
Web or sheet work
118500, 432126, 432239, C23C 1308
Patent
active
041474325
ABSTRACT:
This invention relates to an apparatus for thermal diffusion by means of high frequency induction heating suitable for mass production of semiconductor substrates of uniform quality; wherein a plurality of heating bases, each made of a material having good electric conductivity, and carrying semiconductor substrates, are continuously fed through a furnace tube where the bases are heated by means of high frequency wave excitation in order that each semiconductor substrate receives substantially the same thermal treatment.
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patent: 3202406 (1965-08-01), Tack
patent: 3226254 (1965-12-01), Reuschel
patent: 3473510 (1969-10-01), Sheng et al.
patent: 3645545 (1972-02-01), Garnache et al.
patent: 3710757 (1973-01-01), Porter
patent: 3749383 (1973-07-01), Voigt et al.
patent: 3765763 (1973-10-01), Nygaard
patent: 3811825 (1974-05-01), Enderlein
Amano Masahiko
Aoki Katsuo
Ishihara Osamu
Oka Yoshio
Ozaki Hideki
Nippondenso Co. Ltd.
Stein Mervin
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