Apparatus for the surface treatment of workpieces by means of a

Details Apparatus for the surface treatment of workpieces by means of a Apparatus for the surface treatment of workpieces by means of a

1998-01-06

2000-05-02

Bueker, Richard

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

118719, 118728, 118730, C23F 102, C23C 1600

Patent

active

060568496

ABSTRACT:
In an apparatus for the processing of workpieces and the surface treatment thereof by means of a plasma, a processing chamber (11) to process workpieces and a treatment chamber (10) for the surface treatment of the workpieces by means of a plasma are united in one device. The two chambers (10, 11) are sealed against the environment in a gastight manner and separated from each other by means of a gastight door (12). Thus, workpieces (15) can be machined in the processing chamber (11) by means of a tool (20) while the door (12) is closed. After processing, the conditions in the two chambers (10, 11) are adapted, for example by introducing the same gas into the processing chamber (11) as into the treatment chamber (10). After the pressure in the two chambers (10, 11) has been equalized, the door (12) is opened by displacement, and the workpieces (15) are transferred into the treatment chamber (10).

REFERENCES:
patent: 5314574 (1994-05-01), Takahashi
patent: 5554249 (1996-09-01), Hasegawa et al.
patent: 5611861 (1997-03-01), Higashi
patent: 5628828 (1997-05-01), Kawamura et al.
patent: 5667592 (1997-09-01), Boitnott et al.
patent: 5766360 (1998-06-01), Sato et al.
patent: 5913978 (1999-06-01), Kato et al.

Affiliated with

Also associated with

Rating

Apparatus for the surface treatment of workpieces by means of a does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for the surface treatment of workpieces by means of a , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for the surface treatment of workpieces by means of a will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1591313