Apparatus for the surface treatment of workpieces

Details Apparatus for the surface treatment of workpieces Apparatus for the surface treatment of workpieces

1997-01-03

1999-11-30

Dang, Thi

Coating apparatus

Gas or vapor deposition

With treating means

118724, 55186, C23C 1600, H05H 100

Patent

active

059923466

ABSTRACT:
The invention relates to an apparatus (10) for the surface treatment of workpieces. For providing an apparatus (10) which is suited to perform the plasma treatment of porous workpieces by use of simple means and with continuously high quality, it is provided according to the invention that the workpieces, while arranged in a vaccum container, are subjected first to a cleaning process for evaporating and sucking the adhering foreign substances and subsequently to a plasma treatment process. The apparatus (10) is characterized in that a separator (16) is arranged in the suction pipe (14) between the vacuum container (12) and the vacuum source (18) for separating foreign substances from the gas mixture sucked from the vacuum container (12).

REFERENCES:
patent: 4361472 (1982-11-01), Morrison, Jr.
patent: 4735633 (1988-04-01), Chiu
patent: 4971667 (1990-11-01), Yamazaki et al.
patent: 5072693 (1991-12-01), Straemke
patent: 5211729 (1993-05-01), Sherman
patent: 5261963 (1993-11-01), Basta et al.
patent: 5303558 (1994-04-01), Caton et al.

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