Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Patent
1977-08-29
1979-11-20
Padgett, Benjamin R.
Radiant energy
Photocells; circuits and apparatus
Photocell controls its own optical systems
156643, 156646, 204192E, 204192EC, 204298, 250527, 250531, 250542, B28D 506, H05H 124
Patent
active
041752350
ABSTRACT:
Apparatus for the plasma treatment of semiconductors comprises a plasma generating section, means for introducing a gas suitable for plasma treatment into the plasma generating section, high-frequency discharging means for activating the gas contained in said plasma generating section, a treatment section for treating semiconductor substrates with the activated gas, evacuation means for exhausting the gas, and discharge starting means positiioned in a region including the plasma generating section and its neighborhood, whereby a discharge can be started quickly and assuredly.
REFERENCES:
patent: 3485666 (1969-12-01), Sterling et al.
patent: 3501675 (1970-03-01), Cleaver et al.
patent: 3551312 (1970-12-01), Kahng et al.
patent: 4065369 (1977-12-01), Ogawa et al.
Horiike Yasuhiro
Niwa Kazuo
Shibagaki Masahiro
Kyle Deborah L.
Padgett Benjamin R.
Tokyo Shibaura Electric Co. Ltd.
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