Apparatus for the measurement or machining of an object,...

Geometrical instruments – Gauge – Coordinate movable probe or machine

Reexamination Certificate

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C033S568000, C033S573000, C033S549000, C108S147000, C108S143000

Reexamination Certificate

active

06857195

ABSTRACT:
An apparatus provided with wedge-shaped elements is proposed for the precision positioning of objects37to be measured or machined. A wedge-shaped translational body32is carried by two bearing wedges24, 26. In accordance with the invention the wedges can be independently translated in the x direction. The body is translated in the z direction by moving the bearing wedges over an equal distance but in opposite directions. The body is translated in the y direction by moving the bearing wedges over an equal distance in the same direction. The mutually moving parts of the apparatus are carried by means of fluid bearings. A high precision is thus obtained, because fewer errors due to non-infinite stiffnesses and error motions are accumulated. A laser measuring apparatus74, 38, 40is used for measuring and adjusting the position of the object carrier35.

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patent: 3572680 (1971-03-01), Neff
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patent: 4589351 (1986-05-01), Love
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patent: 6260428 (2001-07-01), Clement
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patent: 6764272 (2004-07-01), Nuxoll et al.
“Motion Control 1997 Product Catalog”, issued by “Micro-Controle, Member of the Newport Group”. pp. 2-38 “UZM Series Motorized Vertical translation Stages”.

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