Apparatus for the measurement of surface shape

Details Apparatus for the measurement of surface shape Apparatus for the measurement of surface shape

1991-12-05

1993-11-09

Willis, Davis L.

Optics: measuring and testing

Range or remote distance finding

With photodetection

356375, 356376, 356360, G01B 902

Patent

active

052607615

ABSTRACT:
Apparatus for measuring the shape of a remote surface (10) comprises a laser (2) whose beam is split into a measuring beam (4) and reference beam (5). The reference beam is passed through a path length modulating mechanism (13, 14) to a datum point (18) while the measuring beam (4) is passed to a point (9) on the remote surface. The reflected beams return along the same paths and are combined at beam splitter (6). The interferometric pattern in the combined beams is analysed to determine the path length of the measuring beam while the transverse coordinates of the point (9) are determined from the position of a beam directing mechanism (12). This process is repeated for a number of points on the surface to measure the shape of the surface (10).

REFERENCES:
patent: 4884697 (1989-12-01), Takacs et al.
patent: 4929077 (1990-05-01), Huisen
patent: 5067817 (1991-11-01), Glenn

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