Apparatus for the gas-phase processing of disk-shaped workpieces

Details Apparatus for the gas-phase processing of disk-shaped workpieces Apparatus for the gas-phase processing of disk-shaped workpieces

1989-07-11

1991-01-01

Bueker, Richard

Coating processes

Coating by vapor, gas, or smoke

156643, 156646, 156345, 118715, 427 39, C23C 1650

Patent

active

049817221

ABSTRACT:
An apparatus for the gas-phase processing of disk-shaped workpieces serves for maintaining cleanliness of the processing space and the workpiece or for avoiding deposits on parts of the workpiece which are not inteded to be coated. In particular a second inner wall system, which is permeable to gas, is provided for the aforementioned purposes. This second inner wall system is associated with a flushing gas system.

REFERENCES:
patent: 4435445 (1984-03-01), Allred

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