Apparatus for the evaporation of liquids

Details Apparatus for the evaporation of liquids Apparatus for the evaporation of liquids

1991-09-19

1993-06-29

Walberg, Teresa J.

Electric resistance heating devices

Heating devices

Vaporizer

392395, 392389, C23C 1426

Patent

active

052242021

ABSTRACT:
A heated evaporator housing is provided at its inlet with an ultrasonic atomizer for reducing monomer to small droplets and a permeable porous body completely occupying a cross section of the housing between the inlet and the outlet. A vacuum pump and a reaction chamber for coating substrates are provided downstream of the outlet.

REFERENCES:
patent: 809839 (1906-01-01), Payne
patent: 2219522 (1940-10-01), Hinsch
patent: 2426939 (1947-09-01), Libman
patent: 2772318 (1956-11-01), Holland
patent: 2920179 (1960-01-01), Shaw
patent: 3350219 (1967-10-01), Shaler
patent: 3786231 (1974-01-01), Torvfelt
patent: 4349723 (1982-09-01), Swiatosz

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