Apparatus for the efficient coating of substrates

Details Apparatus for the efficient coating of substrates Apparatus for the efficient coating of substrates

2003-09-05

2010-06-01

Meeks, Timothy (Department: 1792)

Coating processes

Coating by vapor, gas, or smoke

C427S255280, C427S255310

Reexamination Certificate

active

07727588

ABSTRACT:
A process for the coating of substrates comprising insertion of a substrate into a process oven, dehydration of the substrate, withdrawal of a metered amount of one or more chemicals from one or more chemical reservoirs, vaporizing the withdrawn chemicals in one or more vapor chambers, and transfer of the vaporized chemicals into a process oven, thereby reacting with the substrate. An apparatus for the coating of substrates comprising a process oven, a metered chemical withdrawal subsystem, and a vaporization subsystem.

REFERENCES:
patent: 5252134 (1993-10-01), Stauffer
patent: 5665639 (1997-09-01), Seppala et al.
patent: 5943550 (1999-08-01), Fulford et al.
patent: 6136725 (2000-10-01), Loan et al.
patent: 6214729 (2001-04-01), Uhlenbrock et al.
patent: 6240874 (2001-06-01), Pike
patent: 2107360 (1983-04-01), None
patent: 04154953 (1992-05-01), None
Bunshah et al. “Deposition Technologies for Films and Coatings: Developments and Applications” 1982, Noyes Publications, Park Ridge, NJ, p339.

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