Coating apparatus – With indicating – testing – inspecting – or measuring means
Patent
1979-05-21
1980-07-29
McIntosh, John P.
Coating apparatus
With indicating, testing, inspecting, or measuring means
118412, 118415, H01L 21208, B05C 318
Patent
active
042145503
ABSTRACT:
An apparatus for depositing one or more layers of a material on a substrate by liquid phase epitaxy includes in a furnace tube a furnace boat having a plurality of wells in its upper surface and a substrate-carrying slide movable through the boat and across the wells to bring the substrate into the wells. Over and along the top surface of the boat is an elongated, hollow support rod which is rotatable about its longitudinal axis. A plurality of cup-shaped containers are mounted on or secured to the support end. The containers are positioned along the support rod 30 that each container is over a separate well in the furnace boat. A thermocouple is within and movable along the support rod.
REFERENCES:
patent: 3565702 (1971-02-01), Nelson
patent: 3632431 (1972-01-01), Andre et al.
patent: 3783825 (1974-01-01), Kobayasi et al.
patent: 3791887 (1974-02-01), Deitch
patent: 3909317 (1975-09-01), Itoh et al.
patent: 3933538 (1976-01-01), Akai et al.
patent: 3972753 (1976-08-01), Legros et al.
patent: 4072544 (1978-02-01), Dewinter et al.
Electronics Letters, vol. 8, No. 1, Jan. 13, 1972, pp. 16 and 17.
Cohen Donald S.
McIntosh John P.
Morris Birgit E.
RCA Corporation
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