Apparatus for the control of electrical heating of a semiconduct

Details Apparatus for the control of electrical heating of a semiconduct Apparatus for the control of electrical heating of a semiconduct

1972-10-24

1976-09-14

Goldberg, Gerald

Electricity: power supply or regulation systems

Remote sensing

23273SP, 330 86, 330108, G05F 146

Patent

active

039809420

ABSTRACT:
An arrangement for electrically heating a semiconductor rod which is simultaneously growing by means of materials deposited from a gas phase, wherein the heating current circuit is formed by a heating current source and an electronic switch which is controllable by a variable auxiliary voltage. The heating current is applied to a smoothing circuit by way of a rectifier circuit which is coupled with the heating current circuit. The initial voltage of the smoothing circuit is compared with a desired voltage and the difference voltage determined by this comparison serves to control the generator which supplies the auxiliary voltage. The smoothing circuit is coupled with a preamplifier whose output is connected with the movable tap of a potentiometer. A fixed terminal of the potentiometer is connected to a source which supplies the desired voltage and to the input of a subsequent control amplifier. Another fixed contact of the potentiometer is connected in a feedback circuit to the input of the preamplifier.

REFERENCES:
patent: 3082381 (1963-03-01), Morrill et al.
patent: 3373959 (1968-03-01), Petersen
patent: 3378639 (1968-04-01), Dufendach et al.
patent: 3577090 (1971-05-01), Montgomery, Jr.
patent: 3602804 (1971-08-01), Randall
patent: 3602833 (1971-08-01), Barnette
patent: 3623140 (1971-11-01), Nercessian
patent: 3700412 (1972-10-01), Higashi et al.
patent: 3715651 (1973-02-01), Ott

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