Apparatus for the continuous surface treatment of sheet material

Coating apparatus – Gas or vapor deposition – Running length work

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Details

118 501, 118720, 118723R, 118729, C23C 1600

Patent

active

055296319

ABSTRACT:
A length of sheet material is continuously surface treated, typically modified or coated, by continuously feeding helium gas or a helium gas mixture into a treating chamber while a plasma region is created in the gas under atmospheric pressure, continuously moving a length of sheet material into and out of the chamber through entrance and exit ports to pass through the plasma region, thereby continuously subjecting the sheet at either surface to plasma discharge treatment. The entrance and exit ports are sealed in a less gas tight manner to allow leakage of the helium gas or gas mixture.

REFERENCES:
patent: 5041304 (1991-08-01), Kusano et al.
patent: 5225659 (1993-07-01), Kusano et al.
patent: 5286532 (1994-02-01), Yoshikawa et al.

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