Photocopying – Projection printing and copying cameras – Detailed holder for original
Patent
1984-02-17
1985-08-27
Wintercorn, Richard A.
Photocopying
Projection printing and copying cameras
Detailed holder for original
355 53, 355 73, G03B 2762, G03B 2764
Patent
active
045375011
ABSTRACT:
An apparatus for the attitude control of a plate-form body such as mask or wafer comprises a supporting table, a first movable stage placed on the table and a second movable stage placed on the first stage. The second movable stage is provided means for holding the plate-form body on a reference plane containing the origin of the coordinates defined by two orthogonal coordinate axes. Between the supporting table and the first movable stage there is disposed first driving means. The first driving means is disposed for displacing the first movable stage at at least two positions opposed to each other relative to one of the coordinate axes. The displacement is produced in the direction substantially normal to a segment passing through the origin of the coordinates and forming a determined angle with the reference plane. The displacement of the first stage relative to the table in the direction substantially normal to the above direction is inhibited by first limiting means. Similarly second driving means is disposed between the first and second movable stages for producing the displacement of the second stage at at least two positions opposed to each other relative to the other coordinate axis. The displacement produced by second driving means is in the direction substantially normal to a segment passing through the origin of the coordinates and forming a determined angle with the reference plane. Second limiting means is provided to inhibit the displacement of the second movable stage in the direction substantially normal to the above direction of displacement by the second driving means.
REFERENCES:
patent: 3645622 (1972-02-01), Cachon et al.
patent: 3950095 (1976-04-01), Bouygues et al.
patent: 4084903 (1978-04-01), Pircher
patent: 4093378 (1978-06-01), Horr et al.
patent: 4189230 (1980-02-01), Zasio
patent: 4239381 (1980-12-01), Lacombat et al.
patent: 4315692 (1982-02-01), Heinecke et al.
patent: 4345836 (1982-08-01), Phillips
patent: 4422754 (1983-12-01), Isohata et al.
patent: 4441808 (1984-04-01), Giacomelli
patent: 4477183 (1984-10-01), Kawamura et al.
Hazama Junji
Izawa Hisao
Kakizaki Yukio
Nippon Kogaku K.K.
Wintercorn Richard A.
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