Apparatus for the ablation of material from a target and coating

Details Apparatus for the ablation of material from a target and coating Apparatus for the ablation of material from a target and coating

1990-05-02

1992-01-28

Beck, Shrive

Coating processes

Electrical product produced

Welding electrode

427 42, 118620, 118641, 118 501, 505 1, 505732, B05D 306, C23C 1400, B05B 500, H01B 1200

Patent

active

050843001

ABSTRACT:
A rotating cylindrical target has material ablated therefrom by a laser beam trained to contact the surface along a line parallel to the rotation axis, thereby avoiding problems of crater formation which arise with disc-shaped targets.

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Bartholomew et al., "Low Temp. Syn. of High-T.sub.c Superconductor Thin Films by Laser Assisted Reactive Dep.", pp. 81-84, High-T-Superconducting II; ed. Capone et al.
Burton et al., "Laser Dep. of YBa.sub.2 Cu.sub.3 O.sub.7-5 Thin Films", ed. Harper et al., American Vac. Sec. Series 3, pp. 166-173.
Lynds et al., "Superconduct. Thin Films of (RE) Ba.sub.2 Cu.sub.3 (Ag)O.sub.7-x Prep. by Pulsed Laser Ablation", ed. Brodsky et al., High-T-Superconduct., pp. 707-710.
Lynds et al., "High-T.sub.c Superconductor Thin Films prep. by Pulsed Nd: 1/46 Laser Ablation", Amer. Vac. Soc. Series 3, ed. Harper et al., pp. 159-165.

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