Apparatus for testing surface roughness

Optics: measuring and testing – By polarized light examination – With light attenuation

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356394, 356448, G01B 1130, G01N 2155

Patent

active

042906989

ABSTRACT:
Surface roughness is tested by an optical probing method which involves scanning a beam of light from a laser over a specimen workpiece via a semi-reflecting mirror and a cylindrical lens and detecting the specular component of the light reflected back through the lens and the semi-reflecting mirror to a photomultiplier the output from which is fed to an electronic processor circuit which derive a numerical value representing the mean intensity of the reflected radiation. A workpiece to be tested is then substituted for the specimen workpiece and a new numerical value derived. The two numerical values are compared, as by division or subtraction to obtain an output signal representing the relative surface roughness of the workpiece under test with respect to that of the specimen.

REFERENCES:
patent: 3909602 (1975-09-01), Micka
patent: 3972617 (1976-08-01), Shibato et al.
patent: 3977789 (1976-08-01), Hunter et al.

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