Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Reexamination Certificate
2007-03-27
2007-03-27
Nguyen, Vinh (Department: 2829)
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
C324S758010, C324S765010
Reexamination Certificate
active
10928975
ABSTRACT:
An apparatus for testing substrates reduces the area required and the costs which arise with the testing of substrates, in particular semiconductor wafers, during the production process. The apparatus includes testing arrangements comprising a chuck, a chuck drive, control electronics, probe or probe board holding means with a handling system, a substrate magazine station and an alignment station. The testing arrangements include at least two testing arrangements, both of which are all jointly operatively connected to the handling system, the substrate magazine station and the alignment station.
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Dietrich Claus
Feuerstein Don
Lancaster Mike
Place Denis
Schneidewind Stefan
Baker & Botts LLP
Isla-Rodas Richard
Nguyen Vinh
SUSS MicroTec Testsystems (GmbH)
Tejwani Manu J.
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