Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2005-04-05
2005-04-05
Pert, Evan (Department: 2829)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
C324S1540PB
Reexamination Certificate
active
06876215
ABSTRACT:
Apparatus for testing semiconductor integrated circuit devices in wafer form includes a test head, a probe card support mechanism attached to the test head for supporting a probe card beneath the test head, a wafer prober for presenting successive wafers to be tested to the test head from beneath the test head, and a lifting mechanism attached to the wafer prober for lifting the test head above the wafer prober. Upon lifting the test head above the wafer prober, the probe card support mechanism can move horizontally relative to the test head between an inserted position in which the probe card support mechanism is positioned to enable the probe card to engage contact elements of the test head and an extended position in which the probe card can be removed from the probe card support mechanism.
REFERENCES:
patent: 5274575 (1993-12-01), Abe
patent: 5528158 (1996-06-01), Sinsheimer et al.
patent: 5594357 (1997-01-01), Nakajima
patent: 5754057 (1998-05-01), Hama et al.
patent: 5798651 (1998-08-01), Aruga et al.
patent: 5804983 (1998-09-01), Nakajima et al.
Hannan James M.
Harsany John J.
Jordan James R.
Sheeley Phillip W.
Credence Systems Corporation
Nguyen Jimmy
Pert Evan
Smith-Hill John
Smith-Hill and Bedell
LandOfFree
Apparatus for testing semiconductor integrated circuit... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Apparatus for testing semiconductor integrated circuit..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for testing semiconductor integrated circuit... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3426803