Apparatus for testing semiconductor device

Details Apparatus for testing semiconductor device Apparatus for testing semiconductor device

1988-06-21

1990-06-05

Eisenzopf, Reinhard J.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158P, 439482, G01R 1512, G01R 3100

Patent

active

049317261

ABSTRACT:
A semiconductor device testing apparatus which has a plurality of probes and plurality of coaxial cables connected therewith for impedance matching and a plurality of springs for providing flexibility to the individual probes to absorb a level difference in the surface of a semiconductor device.
The apparatus constructed in this manner allows for an effective test of a semiconductor device with a high density electrode arrangement.

REFERENCES:
patent: 4035723 (1977-07-01), Kraternik
patent: 4504780 (1985-03-01), Marsella
patent: 4508405 (1985-04-01), Damon et al.
patent: 4528500 (1985-07-01), Lightbody et al.
patent: 4593243 (1986-06-01), Lao et al.
patent: 4618820 (1986-10-01), Salvagno et al.
patent: 4724383 (1988-02-01), Hart

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