Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1983-06-09
1986-01-28
Levy, Stewart J.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324158P, G01R 106, G01R 3126
Patent
active
045674329
ABSTRACT:
A system for statically and dynamically testing an integrated circuit die in wafer form at various temperatures includes a multilayer support fixture in which the probes, the static test switching circuitry, and the dynamic test switching circuitry are mounted on separate, spaced apart, planar layers detachably connected to one another, the probe and the probe support board being formed of materials having a low temperature coefficient of thermal expansion. A heated/cooled wafer positioning chuck controls the temperature of the wafer thereon during static and dynamic testing.
REFERENCES:
patent: 3702439 (1972-11-01), McGahey et al.
patent: 3710251 (1973-01-01), Hagge et al.
patent: 3963986 (1976-06-01), Morton et al.
patent: 3979671 (1976-09-01), Meeker et al.
patent: 4038599 (1977-07-01), Bove et al.
patent: 4488111 (1984-12-01), Widdowson
Buol Douglas A.
Mize Dean N.
Pattschull John W.
Wallace Robert M.
Bachand Richard A.
Baker Stephen M.
Levy Stewart J.
Merrett N. Rhys
Sharp Melvin
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