Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1990-10-31
1992-09-15
Nguyen, Vinh
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324158F, 439482, G01R 3100
Patent
active
051481030
ABSTRACT:
A membrane probe (10, 12, 14, 16, 58, 144) for testing integrated circuits (56,138) while still on the wafer upon which they are manufactured includes a flexible visually clear and self planarizing membrane (26) having circuit traces (20) and ground shielding planes (14), terminating resistor (152) and active buffer chips (172) formed thereon. Probe contact pads (36,38) electroplated on areas of the traces, and connector pads (32) plated on the membrane facilitate rapid detachable connection to a test fixture (50). The probe has a configuration, dimension and structure like that of the wafer itself so that automated pick and place equipment (136, 142) employed for handling the wafers (138) may also be used to handle the probes (144). An unique test fixture (50) is adapted to receive and detachably secure a selected probe to the fixture. A metal-on-elastomer annulus (88,104) is employed in the test fixture to make electrical contact between contact pads (32) plated on the back side of the membrane probe and a printed circuit board that is used to route signals to the testing equipment.
REFERENCES:
patent: 4161692 (1979-07-01), Tarzwell
patent: 4697143 (1987-09-01), Lockwood et al.
patent: 4733172 (1988-03-01), Smolley
patent: 4783625 (1988-11-01), Harry et al.
patent: 4791363 (1988-12-01), Logan
patent: 4820976 (1989-04-01), Brown
patent: 4849689 (1989-07-01), Gleason et al.
patent: 4922192 (1990-05-01), Gross et al.
patent: 4928061 (1990-05-01), Dampier et al.
patent: 5027063 (1991-06-01), Letourneau
Denson-Low W. K.
Duraiswamy V. D.
Hughes Aircraft Company
Nguyen Vinh
LandOfFree
Apparatus for testing integrated circuits does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Apparatus for testing integrated circuits, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for testing integrated circuits will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-738802