Apparatus for testing a semiconductor device

Details Apparatus for testing a semiconductor device Apparatus for testing a semiconductor device

2007-09-24

2009-12-01

Nguyen, Ha Tran T (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S1540PB

Reexamination Certificate

active

07626410

ABSTRACT:
An apparatus for testing a semiconductor device that has opposing first and second sides is provided. The semiconductor device includes at least one functional unit on the first side and a plurality of terminals on the second side. The apparatus may include, but is not limited to, a mounting structure, and a plurality of electrodes. The mounting structure has at least one stage that is configured to allow the semiconductor device to be mounted thereon. The mounting structure has a communicating hole that penetrates the mounting structure from the stage. The communicating hole allows the at least one functional unit to face to the communicating hole while the semiconductor device is mounted on the stage. Each of the plurality of electrodes is configured to be contactable to a corresponding one of the plurality of terminals, while the semiconductor device is mounted on the stage.

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