Apparatus for temperature measurement

Details Apparatus for temperature measurement Apparatus for temperature measurement

1975-03-24

1976-09-21

Queisser, Richard C.

Measuring and testing

Gas analysis

Moisture content or vapor pressure

23273SP, 73354, 156601, 236 15B, F27D 2100, G01K 114

Patent

active

039811964

ABSTRACT:
Apparatus for measuring the temperature of a granular semiconductor material of the type which is evaporated when manufacturing a semiconductor such as gallium phosphide within an ampoule or reaction tube, in which a temperature sensor is installed in a measuring tube having a closed end extending into the ampoule and the semiconductor material therein and an opened end which is sealed into a suitable opening in the end of the ampoule with the electrical leads for the temperature sensor being brought out from the measuring tube through the opening in the ampoule.

REFERENCES:
patent: 2688876 (1954-09-01), Barnes
patent: 2862787 (1958-12-01), Seguin et al.
patent: 3092591 (1963-06-01), Jones et al.
patent: 3305313 (1967-02-01), Sirgo et al.
patent: 3481711 (1969-12-01), Maruyama
patent: 3704093 (1972-11-01), Haggerty et al.
patent: 3712110 (1973-01-01), Paulik et al.
patent: 3884642 (1975-05-01), Benedict

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