Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate
2005-01-11
2005-01-11
Lee, John R. (Department: 2881)
Radiant energy
Irradiation of objects or material
Ion or electron beam irradiation
C250S492100, C250S492200, C250S492210, C250S492220, C250S397000, C250S398000
Reexamination Certificate
active
06841789
ABSTRACT:
An apparatus for surface modification of a polymer, metal and ceramic material using an ion beam (IB) is disclosed, which is capable of supplying and controlling a voltage (220) applied to a material to be surface-modified so that an ion beam (IB) energy irradiated to the material is controlled, differentiating the degree of the vacuum of a reaction gas in a portion of a vacuum chamber in which the ion beam is irradiated from that in a portion in which the ion beam is generated, and also being applicable for both-side irradiating processing and continuous processing.
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Cho Jung
Choi Won Kook
Jung Hyung Jin
Koh Seok-Keun
Darby & Darby
Korea Institute of Science and Technology
Lee John R.
Vanore David A.
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