Apparatus for supporting flexible members

Photocopying – Including fiber optics

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271195, 355 3R, 406 88, G03G 1520

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044935480

ABSTRACT:
Apparatus for supporting and tentering a flexible member on a layer of a gaseous medium. A support member has an array of passages which exit at a surface and which are arranged in at least two outwardly diverging rows which run obliquely to the path of travel of a flexible member. Channels are provided which run parallel to the rows of passages and each of which has a curved edge adjacent to the row of passages. The passages are oriented to emit gaseous medium in a direction having a component in the direction of travel of the flexible member, a component transverse to and outwardly to tenter the flexible member and a component perpendicular to the member. The gaseous medium is exhausted over the curved edges of the channels in a laminar flow.

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Apgar et al., "Self-Centering Air Lift Transport", IBM Technical Disclosure Bulletin, vol. 18, No. 7, Dec. 1975, pp. 2141 and 2142.
"Air Film System for Handling Semiconductor Wafers" by J. A. Paivanas & J. K. Hassan, I.B.M. J. Res. Develop., vol. 23, No. 4, Jul., 1979, pp. 361-375.
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