Apparatus for supplying ultrahigh purity gas

Details Apparatus for supplying ultrahigh purity gas Apparatus for supplying ultrahigh purity gas

1991-09-09

1993-07-27

Nozick, Bernard

Gas separation

With nonliquid cleaning means for separating media

Cohesive filter media cleaning

55 66, 55208, 55523, B01D 4100

Patent

active

052307212

ABSTRACT:
An apparatus for suppying ultrahigh purity gas to a semiconductor manufacturing unit.
The apparatus includes ceramic filter which is disposed on at least part of a pipe line connected to the gas introduction inlet of the manufacturing unit and a purging mechanism provided between said filter and said manufacturing unit for purging involved impurity gas to the outside of the system.

REFERENCES:
patent: 1874537 (1932-08-01), Jaycox
patent: 3279151 (1966-10-01), Kauer et al.
patent: 4032308 (1977-06-01), Lawson et al.
patent: 4460466 (1984-07-01), Winter

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