Apparatus for supplying granular raw material for a semiconducto

Details Apparatus for supplying granular raw material for a semiconducto Apparatus for supplying granular raw material for a semiconducto

1992-10-14

1995-10-31

Breneman, R. Bruce

Single-crystal, oriented-crystal, and epitaxy growth processes;

Processes of growth from liquid or supercritical state

Having pulling during growth

117 33, 117214, C30B 1502

Patent

active

054620104

ABSTRACT:
An apparatus for continuously supplying granular polycrystal silicon to a crucible of a semiconductor single crystal pulling apparatus, comprising a funnel-shaped tank having a relatively large capacity, a main hopper having a relatively small capacity and weight, a subhopper having an intermediate capacity and weight and providing a passage from said tank to said main hopper, and a weight sensor for detecting the weight of the main hopper, wherein the overall weight of the main hopper is measured to obtain the flow rate (supply rate) of the granular polycrystal silicon.

REFERENCES:
patent: 3768628 (1973-10-01), Bross
patent: 3998686 (1976-12-01), Meiling et al.
patent: 4002274 (1977-01-01), Rice
patent: 4849175 (1989-07-01), Dupain et al.
patent: 5229082 (1993-07-01), Seidensticker et al.

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