Apparatus for supplying chemical liquid

Details Apparatus for supplying chemical liquid Apparatus for supplying chemical liquid

2011-03-08

2011-03-08

Ganey, Steven J (Department: 3752)

Fluid sprinkling, spraying, and diffusing

With solid means as guard or protector

C239S103000, C239S104000, C239S120000, C239S124000, C239S505000, C239S566000, C239S750000, C239S752000

Reexamination Certificate

active

07900853

ABSTRACT:
Provided is an apparatus for supplying chemical liquid. The apparatus includes: a plurality of nozzles, each of which can be moved forward or backward and supplies chemical liquid; a nozzle cover which accommodates the nozzles therein and has an open end to allow each of the nozzles to move into or out of the nozzle cover; and a nozzle driver which moves each of the nozzles forward or backward.

REFERENCES:
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patent: 5348234 (1994-09-01), v.d. Woude
patent: 5353996 (1994-10-01), Gallacher et al.
patent: 1236977 (1999-12-01), None
patent: 0 959 490 (1999-05-01), None
patent: 3-263831 (1991-11-01), None
patent: 2003209087 (2003-07-01), None
patent: 2007-157898 (2007-06-01), None
patent: 2007-165746 (2007-06-01), None
Korean Office Action for Korean Patent Application No. 10-2007-0102692 issued Nov. 12, 2008.
Office Action issued Dec. 11, 2009 by the Chinese Patent Office for corresponding Chinese patent application No. 200810167467.X.
Office Action issued Sep. 15, 2010 by the Japanese Patent Office for corresponding Japanese patent application No. 2008-263656.

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