Coating apparatus – With means to centrifuge work
Patent
1997-01-28
1999-11-23
Edwards, Laura
Coating apparatus
With means to centrifuge work
118 56, 118500, 118501, 118503, 118319, 118320, 118730, 269 8, 269231, 269235, 134902, 156345, 41422501, 414935, 414941, 432253, B05C 1300
Patent
active
059893427
ABSTRACT:
A substrate holding apparatus holds a rotating substrate without idly rotating the substrate and keeps the substrate in proper balance while the substrate is rotated. In a revolvable holding member, a column-shaped holding part is disposed on a top surface of a column-shaped supporting part, at an eccentric position with respect to a rotation axis of the supporting part. The revolvable holding member is supported by a rotation base for free rotation, and linked to a magnet holding part which incorporates a permanent magnet. On the other hand, a ring-shaped magnet which is disposed in a processing liquid collecting cup is freely driven by an air cylinder in a vertical direction. As the ring-shaped magnet is moved upward or downward and crosses a predetermined line as viewed in a positional relationship relative to the permanent magnet, which is at a height where the permanent magnet is disposed, the direction of a magnetic line of flux of the ring-shaped magnet is reversed. As a result, the direction of the revolving force which acts upon the permanent magnet is reversed, whereby the revolvable holding member holds or releases a substrate.
REFERENCES:
patent: 5376216 (1994-12-01), Yoshioka et al.
Ikeda Masahide
Ohtani Masami
Dainippon Screen Mfg Co. Ltd.
Edwards Laura
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