Apparatus for stripping pellicle

Details Apparatus for stripping pellicle Apparatus for stripping pellicle

1995-11-22

1998-06-30

Osele, Mark A.

Adhesive bonding and miscellaneous chemical manufacture

Surface bonding means and/or assembly means therefor

Presses or press platen structures, per se

2940203, 294262, 294264, B32B 3500

Patent

active

057728429

ABSTRACT:
A pellicle stripping apparatus includes a supporting section for supporting a photomask, the supporting section having gripping portions for gripping at least two edges of a pellicle frame of a pellicle adhered to the photomask; and a steam generating section for generating high temperature steam and contacting the pellicle adhered to the photomask with the steam, the steam generating section including a container having a steam vent directly opposite a portion of the pellicle adhered to the photomask and a heater for boiling water in the container.

REFERENCES:
patent: 3873080 (1975-03-01), Bostic
patent: 3990907 (1976-11-01), Endo et al.
patent: 4255216 (1981-03-01), Conant et al.
patent: 4317986 (1982-03-01), Sullivan
patent: 4898058 (1990-02-01), Seifert
patent: 4904329 (1990-02-01), Hein et al.

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