Chemistry: electrical and wave energy – Apparatus – Vacuum arc discharge coating
Patent
1997-08-30
2000-03-14
McDonald, Rodney
Chemistry: electrical and wave energy
Apparatus
Vacuum arc discharge coating
20419238, 118723VE, C23C 1432
Patent
active
060368284
ABSTRACT:
An apparatus for applying material by cathodic arc vapor deposition to a substrate is provided which includes a vessel, apparatus for maintaining a vacuum in the vessel, a disk-shaped cathode, apparatus for selectively sustaining an arc of electrical energy between the cathode and an anode, and apparatus for steering the arc around the cathode. The arc of electrical energy extending between the cathode and the anode liberates a portion of the cathode which is subsequently deposited on the substrate located inside the vessel.
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Randhawa, H. and Johnson, P. C. "Technical Note: A Review of Cathodic Arc Plasma Deposition Processes and Their Applications." Surface and Coatings Technology, 31 (1987), pp. 303-318. Elsevier Sequoia.
Beers Russell A.
Royal Tyrus E.
Getz Richard D.
McDonald Rodney
United Technologies Corporation
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