Apparatus for spraying a liquid on a spinning surface

Details Apparatus for spraying a liquid on a spinning surface Apparatus for spraying a liquid on a spinning surface

1983-03-14

1984-07-03

Beck, Shrive P.

Coating apparatus

Program, cyclic, or time control

Having means to reverse operation at end of travel path

118706, 118 52, 118 56, 118321, 427425, 427240, B05B 318, B05B 314

Patent

active

044572590

ABSTRACT:
A liquid spray apparatus provides predetermined, uniform quantity of liquid (such as photoresist developer) per unit area of surface by a parabolic cam mechanism, arranged to repeatedly reciprocate a nozzle at a predetermined varying linear velocity a plurality of times over a spinning surface, such as a semiconductor device wafer. The mechanism moves the nozzle at a parabolic varying velocity whereby the liquid is deposited at a uniform quantity per unit area. The cam is continuously rotated and engaged with a spring-biased cam follower during the spraying period. The cam follower is engaged and disengaged with the cam by a programable timer defining the spraying period.

REFERENCES:
patent: 2487111 (1949-11-01), De Koning
patent: 4267212 (1981-05-01), Sakawaki

Affiliated with

Also associated with

Rating

Apparatus for spraying a liquid on a spinning surface does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for spraying a liquid on a spinning surface, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for spraying a liquid on a spinning surface will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1625403